Cascaded Micromirror Pair Driven by Angular Vertical Combs for Two-Axis Scanning
نویسنده
چکیده
Monolithically cascaded one-axis micromirrors driven by angular vertical combs are designed and fabricated. Using "W"-shape ray optics, we demonstrate two-axis scanning covering k6.0' two-dimensional area at resonant modes: 7.5kHz, +I 7V in fast-scanning mirror, 1.2kHz, +7V in slow-scanning mirror. INTRODUCTION Because of their independently controllable scanning directions, cascaded one-axis light-beam deflector pairs have provided light-beam two-axis scanning for many kinds of optical instruments [l]. We present cascaded one-axis micromirror pairs driven by angular vertical combs (AVCs) for two-axis scanning. AVC drives have been proposed for inherently selfaligned comb fingers and large rotation angle at low voltage [2-41. Micromirrors driven by AVCs with thermally-reflow polymer hinges have an advantage of simple fabrication process [2,3]. DESIGN The schematic of the two-axis scanning optical system is illustrated in Fig. 1 . The system is composed of a fixed mirror and the combination of fast-scanning mirror and slow-scanning mirror, shown in Fig. 2. The rotational axes of the mirror pair are perpendicular to each other. The "W"-shape ray geometry allows twoaxis raster scanning. , / \ Fast Scan. Mirror Slow Scan. Mirror Fig.1 Optical system of the two-axis scanner 0-7803-7830W03/$17.0002003 I E EE Each one-axis scanning mirror is designed separately for the system to achieve raster scanning. The fastscanning mirror has a stiff spring and is driven at its resonant frequency. The long mirror plate in the slowaxis covers the entire walk-off distance of the light beam caused by the first scanner. Fa+tScan.Mirror SlowScan M i r r o r
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